Microfabrication Lab>>People

Prof. Wayne A. Anderson

Prof. Wayne A. Anderson established the initial clean room more than 15 yeas ago. Recently, the room was expanded by about 800 sq.ft, and much more equipment added. the room upgrades were made possible by Profs. Bird, Mitin, Verevkin, Yoon, and Oh.

>>Research

Wayne Anderson has a wide range of interests in electronic materials and devices. Early work dealt with solid-state microwave devices, Schottky and metal-insulator-semiconductor solar cells, deposition of thin-film silicon, amorphous silicon solar cells, radiation effects in semiconductors, and organic semiconductors. More recent work has included low-cost P/N junction solar cells, heterojunction solar cells, conductive-transparent oxides, high barrier height Schottky diodes and Si:Ge applications. Current work includes Schottky devices on InP, InGaAs or ZnSSe, field effect transistors, thin-film Si for solar cells, applications of thin-film Si, thin-film capacitors, thin-film resistors, superconductors and flat panel displays. Deposition, analysis and application of ZnO of is the most recent study.

>>Recent Projects

Thin Film resistors for specialty applications

High dielectric thin film capacitors
Nanowires
Solar cell fabrication, analysis and environmental studies
Thin film transistors for flat panel displays
Ohmic and rectifying contacts to Si, GaAs, ZnSe and like semiconductors
Photodetectors using III-V and II-VI semicondictors
M-S-M photodetector
Thin film amorphous/polycrystalline silicon for solar cells & flat panel

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