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  1. Refrigerator
  2. Microscope
  3. Ozone cleaning system
  4. RTA
  5. Fume hood
  6. 3 gun sputterer
  7. E-beam evaporator
  8. RIE
  9. Ellipsometer & Four-Point probe
  10. RGA computer
  11. ECR control
  12. ECR vacuum system
  13. DI water system
  14. Fume hood
  15. 3-zone tube furnace
  16. Trion plasma enhanced chemical vapor deposition system
  1. Clean room entry
  2. Clean room entry
  3. RIE
  4. Oven
  5. Spinner
  6. Spinner
  7. Clean room wet station
  8. Oven
  9. Hot plate
  10. Exhaust
  11. Clean room furnace
  12. Evaporator
  13. E-beam controller
  14. Evaporator
  15. Mask aligner
  16. Mask aligner

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