3-D MEMS Fabrication
Automated multidirectional UV exposure has been demonstrated using a collimated UV source and a movable stage equipped with two computer controlled motors and a microcontroller for complex three dimensional (3-D) microstructures. The stage is tilted and rotated using independently controlled motors by userís programming during UV exposure. Various dynamic operations with the angular velocities of tilting and rotation harmonically related have been exercised using a SU-8 substrate and the reverse-side exposure scheme. Implemented structures using the dynamic mode include a vertical reverse triangular slab, a quadruple reverse triangular slab, a cardiac horn, screwed wind vane shapes with two blades and four blades. Lay tracing simulation using mathematical equations has been performed to confirm the shapes of resultant structures.